Handbook of Silicon Based MEMS Materials & Technologies by Lindroos V., Tilli M., Lehto A., Motooka T.

Handbook of Silicon Based MEMS Materials & Technologies



Download Handbook of Silicon Based MEMS Materials & Technologies




Handbook of Silicon Based MEMS Materials & Technologies Lindroos V., Tilli M., Lehto A., Motooka T.
Language: English
Page: 636
Format: pdf
ISBN: 0815515944, 9780815515944
Publisher: William Andrew

Review

"This is a comprehensive state-of-the-art guide on MEMS materials and manufacturing for current and future applications. Engineers, materials scientists, and MEMS developers will find this handbook to be an invaluable resource that will not sit on a bookshelf but rather be a well-used reference text used in the development of MEMS devices."--Electrical Insulation

"Handbook of Silicon Based MEMS Materials and Technologies was published in April 2010. Altogether 73 leading experts from 12 countries participated to the writing process and the result was nearly 700 pages about materials, modeling, measuring, processes and packaging within silicon based MEMS."--MEMS Blog

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